Then three kinds of films are acquired: silicon film on the surface of glass, the film on silicontarget and transferred film on another silicon substrate.
这样我们得到了三种薄膜:玻璃表面的硅薄膜、硅靶上的薄膜和转移到硅基底上的薄膜。
2
In this paper, WO3 thin film was deposited on glass substrate and silicon slice by DC reactive magnetron sputtering and using metal tungsten as target.
本文采用直流反应磁控溅射工艺,以金属钨为靶材,在玻璃和单晶硅片上沉积了WO 3薄膜。
3
The distinguishing feature of this plan is to adopt silicon backward photoelectric diode as target screen and to scan with fast electron.