Compared with the traditional siliconslice detergent, the unit cost is reduced by about 60%.
本发明与传统的硅片清洗剂相比单位成本下降近60%。
2
In this paper, WO3 thin film was deposited on glass substrate and siliconslice by DC reactive magnetron sputtering and using metal tungsten as target.
本文采用直流反应磁控溅射工艺，以金属钨为靶材，在玻璃和单晶硅片上沉积了WO 3薄膜。
3
S2, coating one or a plurality of metallic layers on the back of the siliconslice subjected to the surface treatment by vaporization on the vacuum condition;