With MRFM, the sample to be examined is attached to the end of a tiny silicon cantilever (about 100 millionths of a meter long and 100 billionths of a meter wide).
To use the elements you should prepare the adjustable transformer or silicon controlled transformer voltage meter current meter and autocontrol temperature meter etc.
使用元件必须配备调压变压器或可控硅调压器及电压、电流表和温度自动控制仪表等。
3
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.