The research about siliconcarbides was at the initial stage, especially the characterization, formation mechanism and distribution of defects.
目前,碳化硅的研究仍然处于起步阶段,尤其是对缺陷的表征、形成机理和分布都没有深入的研究。
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The paper introduces simply the characteristics of three experimental materials used to process micro-structures, single-crystal silicon, piezoelectricity ceramic and cemented carbides.