Exhaust unit, exhausting method, and semiconductor manufacturing facility with the exhaust unit.
排气单元，排气方法，和具有排气单元的半导体制造设备。
2
The experimental result can to some extent be a guidance for further study of semiconductor refrigeration, and its application in the thermoelectric-refrigerating unit.
该研究结果对半导体制冷技术在小型制冷保温容器中的进一步研究和应用具有一定的指导意义。
3
The smallest unit that supports electron flow in a semiconductor material ; a hole in P-type silicon or a free electron in N-type silicon.