Phosphine (PH3) is an important electronic specific gas which is mainly used in fields of N-type semiconductordoping, ion implement and chemical vapor deposition (CVD) etc.
Their first strategy is a technique, common in chip manufacturing, called doping, in which atoms of some other element are added to a semiconductor crystal.
第一步策略是一个在芯片产业上普遍使用的技术,叫做“掺杂”,就是在半导体晶体中加入其它元素的原子。
3
A new method for impurity doping of semiconductor has been developed.