The image acquisition system of SEM was designed based on the PCI bus to control the scanninggenerator, the image acquisition, data communication and the photograph system.
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
3
The virtual signal generator has 12-channels outputs for linear scanning frequency signal or fixed frequency sine wave excitation signal.