The results show that the stair depth error and stair slopeerror can cause great modulations in the near field of CSG, but the dignment error has little effect on the modulations.
计算结果表明深度误差和塌边误差对光束近场调制有很大影响，对位误差相对影响较小，而相互影响更加严重。
3
According to the practical fabrication process of CSG, a comprehensive fabrication error model of CSG including alignment error, duty cycle error, depth error and stair slopeerror is built up.