In a line scan defect inspection system, the illuminator properties, such as brightness, light array linearity, lifetime and spectrum range, are more critical.
在线扫描缺陷检测系统中，对光源的亮度、均匀性、直线性、寿命、光谱范围都提出了较高的要求。
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This method has some advantages such as simple structure, high scan frequency, high resolution and good linearity.