The electrostatic actuator has a top electrode, a bottomelectrode, and an insulating film disposed between the top electrode and the bottomelectrode.
上述静电型致动器具有上部电极、下部电极及在上述上部电极和上述下部电极间配置的上述绝缘膜。
3
The channel semi-conductor material is adopted to adorn the bottomelectrode, so the contact potential difference between the electrode and the channel material can be reduced.