High temperature processing allows for increased deposition rates and decreased specificresistivity values for the deposited copper films.
高温处理会增加沉积速率,减少铜沉积薄层的电阻率。
2
Influence of process factors including hole diameter of filter, pressurised head and temperature, on the specificresistivity of aluminum was studied.
主要研究了过滤器孔径、工作压头及温度等工艺因素对铝电阻率的影响。
3
Specific surface area, resistivity, and distribution of pore diameter of air electrode were measured. Polarization curve and operating performance of air electrode have been tested.