abbr.半导体设备通信标准(SEMI Equipment Communication Standard)
网络释义
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?半导体设备通信标准(Semi Equipment Communication Standard)
基于GEM/SECS协议的数据采集系统与实现 体设备与电脑整合制造(computer integrated manufac-turing,CIM)主机之间的通信协议为半导体设备通信标准(SEMI equipment communication standard,SECS),此协议是由半导体设备与材料国际联盟(semiconducter equipment and mat