Dielectric breakdown of BST thin films prepared by RFsputtering is studied in this paper.
采用射频溅射制备BST薄膜,研究了薄膜的介电击穿特性。
2
Through the technology of RF and DC reactive sputtering manufacture, H2S gas sensors have been developed on silicon substrate on which a heater made of Pt were attached.
通过交流和直流反应溅射,我们以硅基片(表面上有白金加热电极)为基底制作H_2S气敏元件。
3
Thin films of lead lanthanum zirconate titanate (PLZT) were deposited by rf magnetron sputtering from oxide targets onto unheated Si substrates.