The paper introduces simply the characteristics of three experimental materials used to process micro-structures, single-crystalsilicon, piezoelectricity ceramic and cemented carbides.
简要介绍硬质合金、压电陶瓷和单晶硅的加工特点及利用超声微细加工这三种材料的优势。
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Although high-quality single-crystalsilicon may be the best-known material for making electronic components, it isn’t the only one—and it’s not the only one being teased into different shapes.