A speed control system of single-crystalfurnace lifting mechanism based on mixed self-adjusting fuzzy PID controller is introduced in this paper.
采用自调整因子混合式模糊pid控制方法,对单晶炉的提拉速度进行控制。
2
The singlecrystalfurnace is a special equipment of growth singlecrystal for LSI. This paper mainly introduces the design of vacuum system and charge system of crystal furnace.
单晶炉是生长大规模集成电路所需要硅单晶的专用设备。本文主要介绍了单晶炉的真空系统与充气系统的设计。
3
Aiming at the singlecrystal growth furnace situation and existing problem, a new style of singlecrystal growth furnace automatic control system with utility and economic is introduced.