The characters of seriesprocess are suitable for the confluence desilication.
串联法的工艺特点，更宜于采用合流脱硅。
2
The results of test show that atmospheric confluence desilication in the seriesprocess can approach the required siliceous modulus.
试验结果表明，串联法采用常压合流脱硅流程可以达到所需要的硅量指数。
3
Vertical scanner is the supporting part of a seriesprocess ion implanter, which transfer high speed movement from outside of the chamber to the target inside.