Slit widths of instrument for measuring resolution of diffraction gratings in detail are discussed on theory of instrumentprofile.
用仪器函数理论对分辨率测试仪的缝宽作了详细讨论，并提出了改变缝宽来确定光栅实际分辨极限的新方法。
2
Automatic profile and flatness control system is composed of shape control software, hardware and network configuration and measuringinstrument.
自动板形控制系统包括板形控制软件、硬件及网络配置和检测仪表。
3
The instrument can measure not only 2d profile but also 3d topography, and it has large measuring range, high precision, small measuring touch force and more parameters.