An optoelectronic inspection system based on the direct imagery theory is presented for non-contact observation of the micro-profile of a small area, especially that of the underside of a micro-pore.
针对微小面积，特别是微小“盲孔”底面形貌的非接触精密检测，提出了一种基于直接成像原理的光学结构。
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SEM inspection results obtained on patterned wafers show the cleanliness, good profile and CD retention of the structures after the He:H2 plasma strip and subsequent wet cleans.
Article 24 the banking regulatory authority shall conduct on-site inspection of the business operations and risk profile of the financial institutions of the banking industry.