Sine digital grating (computer generated grating) is acted as referencegrating.
参考栅采用计算机绘制的正弦型数字栅。
2
Grating is placed in image space of objective lens, and used as the shearing part. Light wave from reference object and measured object interfered at the image space.
它在成像物镜的像方空间放置光栅，利用光栅的衍射原理，使来自参考物和被测物的光波在像面发生干涉。
3
It's unnecessary to collect deformed grating images of object reference plane, which reduces operation steps and takes no solution for the phase of object reference plane.