The radiated noise can be analyzed and its spectrum can be recorded by signal processingcell.
信号处理模块分析噪声并记录频谱特性和时域统计特性。
2
Particularly, the present invention provides a modular processingcell to be used in a cluster tool.
具体地，本发明提供 一种模块化处理单元。
3
This paper discusses the key technologies of digital IF processing, the principle and the function of each processingcell are presented and the realization of them is also given in the paper.