Probecard, method of designing the probecard, and method of testing semiconductor chips using the probecard.
探针卡,该探针卡的设计方法,以及使用该探针卡测试半导体芯片的方法。
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In chapter4, the whole fabrication process, experiment results and some SEM photos are given. At last, the resistance of the probecard is measured, and the results meet our request well.
The wall thickness measurement system by ultrasonic scan imaging technology was described, in which multi-channel probe, pulser-receiver PCI card and network were applied successfully.