The effect of electrostatic force of the drive voltage on the accelerometer had been researched when the bias voltage polarity is positive-negative configuration.
前人在研究驱动信号对传感器的静电力效应时，用偏置电压极性为正—负配置的驱动信号进行研究。
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In this paper, quantitative analyses on the effects of driving signal with different bias voltage polarity are made for double-sided driving with voltage feedback.