Second, optical broadband monitoring is combined with additional quartzcrystal sensors to realize a hybrid process control for improving layer thickness accuracy.
第二，光学宽带监测系统与石英晶体传感器相结合，实现混合工艺控制技术，提高薄膜厚度的精度控制。
2
A good result is obtained in measuring QuartzCrystal plane angle when the method is used in automatic measure& control system of X-ray diffraction goniometer.