Progresses in research on microstructure, electrical and optical properties and preparation technology of TCO thinfilms are reviewed.
综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。
2
Several methods of the preparationof ITO thin film with sol-gel technique were introduced. The ITO thin films were gotten by the inorganic method.
介绍了几种用溶胶凝胶法制备ito薄膜的工艺方法,用其中一种无机的方法成功制备了ITO透明导电膜。
3
The preparation and properties study of cubic boron nitride thinfilms are attractive and also very difficult to international scientific wold for recent years.