Thus, studying methods and techniques to design a high precisionscanning control system has practical sense.
因此，研究高精度扫描控制系统设计方法和技术具有重要的实际意义。
2
Thesystem is composed of a IR focusing Subsystem, a precisionscanning six dimensions stage anda data acquisition module.
该系统由红外聚焦光学子系统、六维精密扫描工件台及数据采集子系统构成。
3
A high precisionscanning and control system is an important part in modern scanning microsystem, which affects the quality of sample imaging for scanning microscope.