The researches of this paper are very important and significative job to improve precision of servo-control system of three axis optical tracking test table even all type of electric simulator tables.
Optical measurement system of high accuracy, precision coordinate test station;
高精度光学测量系统，精密坐标试台；
3
Confocal scanning optical microscopy (CSOM) is a high precision microscopical image system which based on the confocal principle, scanning technology and image processing.
共焦扫描显微成像系统(C S O M)是以共焦原理为基础，集扫描技术和数字图像处理技术为一体的高精度的成像系统。