The plasmatheory, plasma cleaning mechanisms and applications for plasma cleaning system are described.
简要介绍了低温等离子体清洗设备清洗机理、特点及其应用。
2
Based on the theory of electron current collected by probe, that the maximum derivative of electron current with respect to probe potential corresponds with the plasma potential is presented.
根据探针收集电子流的理论，提出电子流对探针电位的一次微商的最大值对应着等离子体电位。
3
In this paper, the ICRF fast wave mode-conversion and correlative damping mechanism in an inhomogeneous hot plasma are investigated for the configuration of tokamak by using the kinetic theory.