Based on the theory of electron current collected by probe, that the maximum derivative of electron current with respect to probe potential corresponds with the plasma potential is presented.
根据探针收集电子流的理论，提出电子流对探针电位的一次微商的最大值对应着等离子体电位。
2
A microwave resonator probe method for diagnosing local plasma electron density is described, and the measurement principle, design method and experiment results are included.
The characteristic of spatial distribution of plasma ion density in reaction chamber were diagnosed by a Langmuir double probe, and the effect of Ar pressure and RF power were also investigated.