As the rapid development of communication system in every area, the research and development of the radiofrequencypower amplifier has been progressing greatly.
随着军用、民用通信系统的迅猛发展，对功率放大器的研制也提出了更高甚至是全新的要求。
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An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radiofrequencypower from an RF power supply to the interior of the processing chamber.