The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.
本文研制的集成皮拉尼传感器系统能够作为气压检测器应用于中真空和粗真空的测量。
3
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.