A novel method for measuring the anisotropicetch rate distributions of Si is described.
介绍了一种测定硅各向异性腐蚀速率分布的新方法。
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Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
Last, a technique known as anisotropic ion beam milling (IBM) is used to etch through the mask to make an array of holes, creating the nanoporous metal.