After that the industry will have to move on to nonoptical techniques, such as electron beams or even X rays, which have wavelengths less than a nanometer, one thousandth of a micron.
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2.
After that the industry will have to move on to nonoptical techniques, such as electron beams or even X rays, which have wavelengths less than 1 nanometer, or one-thousandth of a micron.