In order to perform such tasks, researchers have had to rely on non-optical options like electron microscopy.
为了实现这样的任务，研究人员已经可以依靠电子显微镜等非光学成像方法进行试验研究了。
2
The high cost in traditional optics lithography drives the scientists to invent new non-optical methods to replace processes currently used in IC factories.
传统光学光刻技术的高成本促使科学家去开发新的非光学方法，以取代集成电路工厂目前所用的工艺。
3
Nanoimprint, as a non-optical lithography technology , has demonstrated its ability for semiconductor manufacturing by offering resolution below sub-10nm feature size, high throughput and low cost.