In this paper, the nonlinear diffraction problem is studied with potential flow theory in frequency domain for three-dimensional floating body sailing in waves on deep water.

Nonlinear distortion caused by diffraction in the lithography process has severely affected the quality of surface profile, which is the main reason for pattern distortion in lithography.

This phenomenon can be explained by the diffraction effect of the Gaussian beam from the laser induced phase hole in the nonlinear medium caused by Kerr effect and thermo optic effect.