电子、通信与自动控制技术

• 光刻

  We also explored the different technology process such as photolithograph, strip and grinding the facet of the substrate, obtained good technology parameters.

  在实验方面，我们也对光刻、剥离、磨片等工艺步骤进行了探索，找到了较好的工艺参数。

能源科学技术

• 光刻

  So, it will promote MEMS research if we can fabricate high-aspect microstructures by combining common uv-photolithograph technology and other MEMS techniques .

  因此,如能采用常规的紫外线光刻,结合其它的MEMS 技术制作可动微结构将会大大推动MEMS 的研究工作。