A basic PCMsystem is introduced in detail, then a complete technique project is brought forward according to this system's requirement.
本论文首先对P CM系统进行了详细介绍,然后结合本系统的技术要求,提出了完整的技术方案。
2
An entire PCMsystem of MEMS surface manufacturing process should include three parts: electronic parameters extraction, geometric parameters extraction and material property parameters extraction.