For the existing capacitance extraction software can hardly satisfy the needing of actual project, it is still a hard task to improve the accuracy and speed of capacitance extraction.
High precision capacitance displacement sensor is used to measure the actual output of moving platform and formed a system of feedback control.
高精度的电容式位移传感器用来测量动平台的实际输出并形成反馈控制系统。
3
The new model includes winding leakage, iron losses and distributed capacitance. It has more similarity to the actual model. At last this model is verified by simulation.