The infrared target simulator is composed of infrared target image transmitter and the opticalprojectionsystem.
红外目标模拟器由红外目标图像发生器和投影光学系统组成。
2
The specific parameters of main opticalsystem are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
Differing from the traditional optical measuring method, the measuring system USES two CCD cameras to record projection grating, thus reduces errors and improves measuring accuracy.