A new opticalinterferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element.
目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。
2
With using absolute opticalinterferometer for measuring length of block gauge, it is necessary to solve the problem of phase jump for reflecting of light on its surface.
在用绝对光波干涉法测量量块长度时，必须解决光在量块表面反射时的位相跃变问题。
3
A new equipment of dynamic aiming is described. Both opticalinterferometer principle and circuit construction are described. Experiments prove its rationality and feasibility.