This sample can be used in chip of integrated optics for fibre opticalgyroscope and so on.
该样品能满足集成光学光纤陀螺芯片等的需要。
2
The overexposure technique is valuable for fabrication of devices with stabilized linewidth such as integrated opticalgyroscope with spiral waveguide.
过曝光技术对线宽稳定度要求较高的器件，比如具有螺线波导的集成光学陀螺的制作有较重要价值。
3
Comparing with conventional electro-mechanical gyroscope and electro-opticalgyroscope, MEMS gyroscope has the advantages of low cost, small size, low weight and high reliability.