A new laser interferometer method is presented and used to quick measurement of parallelism of opticalflat.
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
2
Quick adjusting method of interference fringes and correct quotation method of standard opticalflat flatness are analyzed.
文章重点分析干涉条纹的快速调整方法与标准平晶平面度的正确引用方法。
3
At present, long opticalflat is still mainly adopted as calibrating benchmark in straightness measurement, whose accuracy is not so high (especially in measuring great-size parts).