Ceramic piezoresistivepressuretransducer and a method for making it are disclosed.
介绍了一种采用陶瓷基座、陶瓷膜片制备的压力传感器。
2
A piezoresistive micro pressuretransducer fitted on the top of the chamber is used to measure the pressure pulsations in the micropump chamber.
采用安装在泵腔上的压阻式微型压力传感器完成微泵泵腔压力脉动测试。
3
A pressuretransducer can be configured to include the use of a pressure sense die with piezoresistive elements integrated into the sensor die and in a Wheatstone bridge configuration.