Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
The piezoelectric scanner is one of the key components of scanning probe microscope.
三维压电陶瓷扫描器是扫描探针显微镜的关键部件。
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Then, PZT piezoelectric ceramics sensor's probe is contact with the center of diaphragm, if we use the uniform load model to calculate and analyze, it will cause error in micro displacement detection.