Based on the principle of piezoelectricdrive, we make an explorative study of a novel feeding device with vibration of high frequency and low amplitude.
The low-voltage driving circuit is adopted to drive a piezoelectric ceramic phase shifter to shift the phase of the reference beam, so as to make the instrument lighter, smaller and cheaper.
采用低压驱动电路驱动压电陶瓷相移器对参考光束进行相移，从而使仪器质量减轻、体积缩小、成本降低。
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This dissertation gave a solution to improving positioning accuracy of rotary table by using a piezoelectric ceramic drive.