A piezoelectrically actuated micro array jet has been developed for the application of the inhalation drug therapy.
提出了一种压电致动的阵列微喷，以面向吸入式药物治疗应用。
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Piezoelectrically driven micropositioning stage (piezo-stage) is one of the typical piezoelectrically driven actuator which is widely used in scanning probe microscopy.