A uniaxial tensile test method for measuringmechanical properties of MEMS thin film materials is presented.
介绍了一种用于MEMS薄膜材料力学特性测试的单轴拉伸试验方法。
2
Therefore, this may be a useful new method in the case that other methods are not suited to measuringmechanical vibrations.
所以在测量机械振动的其他方法不适用的情况下,这可能成为一种有用的新方法。
3
Through measuring the mechanical parameters by using a German special measurement software as an example, the basic principle and application of cat technique are described.