A new laser interferometer method is presented and used to quick measurementofparallelism of optical flat.
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
2
By study the measurementofparallelism between Optical head and Spindle motor at present, we find that there are expensive and inconvenient. So it needs to design a new convenient method.
In this paper a new method and apparatus with laser measurement system for measuring parallelism and perpendicularity of large workpieces are discussed.