The method is used not only in the measurement of grating, but also in the dynamic measurement of other metrological length components.
本系统不仅用于计量长光栅动态检测，还可用于感应同步器、磁栅、线纹尺等长度计量元件的动态检测。
2
According to metrological characteristics of diffraction grating, the measurement error models are built up and the equations between installation and measurement errors of grating are deduced.