The core of the closed-loop control system for the mirror tilting systems are displacement sensors which determine the exact positional values via the mirror movement.
为了实现对镜面倾斜角度的闭环控制，核心的问题是通过非接触位移传感器准确测量镜面角度。
2
The simulation shows that the first mode frequency for performance is near 1000Hz, which is much lower than that of the second mode. The displacement of mirror is caused by the torsion of beam.
模拟结果表明，该微动作器的第一模态频率远低于第二模态，镜子的位移由梁的扭转引起。
3
Real time investigstions on the thermal process of laser-induced damage of a Almirror and a reflectance-increasing Al mirror by photothermal displacement technique(PDT)are described.