It is important to set the magnetic field reasonably and to control the movement of arc on large rectangular target.
大面积矩形电弧蒸发源合理的设置靶源磁场并有效的控制电弧弧斑的运动是十分重要的。
2
A new structure of arc - suppression coil with magnetic bias and its control method is presented.
提出了一种新结构的偏磁式消弧线圈及其控制方法。
3
The DSP realizes functions of sampling, PI regulation, communication and so on to digitally control the excitation current of arc-suppression coil with magnetic bias.